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Well-posedness of a quasilinear evolution problem modelling MEMS with general permittivity

. J. Evol. Equ., 17 (4): 1129--1150 (2017)
DOI: 10.1007/s00028-016-0375-x

Abstract

"Subject of consideration is the analytical investigation of a coupled system of partial differential equations arising from the modelling of electrostatically actuated microelectromechanical systems with general permittivity profile. A quasilinear parabolic evolution problem for the displacement u of an elastic membrane is coupled with an elliptic free boundary value problem that determines the electrostatic potential ψ in the region between the elastic membrane and a rigid ground plate. The system is shown to be well-posed locally in time for all arbitrarily large values λ of the applied voltage, whereas small values of the applied voltage, which do not exceed a certain critical value λ∗, do even allow globally in time existing solutions. In addition, conditions are specified which force solutions emerging from a non-positive initial deflection to stay non-positive as long as they exist.''

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