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%0 Conference Paper
%1 conf/nems/WangHWH10
%A Wang, J.
%A Huang, Y.
%A Wu, W. G.
%A Hao, Y. L.
%B NEMS
%D 2010
%I IEEE
%K dblp
%P 255-258
%T Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment.
%U http://dblp.uni-trier.de/db/conf/nems/nems2010.html#WangHWH10
%@ 978-1-4244-6543-9
@inproceedings{conf/nems/WangHWH10,
added-at = {2012-06-27T00:00:00.000+0200},
author = {Wang, J. and Huang, Y. and Wu, W. G. and Hao, Y. L.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2f0674a14a1cbd45b48d3be4cbbed2559/dblp},
booktitle = {NEMS},
crossref = {conf/nems/2010},
ee = {http://dx.doi.org/10.1109/NEMS.2010.5592202},
interhash = {fde213cfa8be180fef05b13ef9614159},
intrahash = {f0674a14a1cbd45b48d3be4cbbed2559},
isbn = {978-1-4244-6543-9},
keywords = {dblp},
pages = {255-258},
publisher = {IEEE},
timestamp = {2016-02-02T15:31:06.000+0100},
title = {Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment.},
url = {http://dblp.uni-trier.de/db/conf/nems/nems2010.html#WangHWH10},
year = 2010
}
