Inproceedings,

Portable micro liquid dosing system

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Proceedings / IEEE The Eleventh Annual International Workshop on Micro-Electro-Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, page 526-531. Piscataway, NJ, IEEE Service Centrum, (1998)
DOI: 10.1109/MEMSYS.1998.659813

Abstract

We are able to present a portable battery powered micro liquid dosing system, which controls the liquid flow from a pressurized reservoir to a capillary output port. The system consists of a capillary buffer volume controlled by a resonant sensor, a micromachined silicon valve driven by a piezoelectrical actuator, an electronic control system comprising of a sensor processing electronics, a DC/DC-converter for controlling the actuator and a pressurized reservoir. Components have been designed, validated each in characteristics and at last been assembled to a complete dosing system. The typical input pressure is in the range of 0 to 0.4 bar, typical flow rates are up to 0.25 mi/min at 0.22 bar

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