%0 Journal Article %1 journals/mr/HolzerSKGS07 %A Holzer, Stefan %A Sheikholeslami, Alireza %A Karner, Markus %A Grasser, Tibor %A Selberherr, Siegfried %D 2007 %J Microelectronics Reliability %K dblp %N 4-5 %P 623-625 %T Comparison of deposition models for a TEOS LPCVD process. %U http://dblp.uni-trier.de/db/journals/mr/mr47.html#HolzerSKGS07 %V 47

@article{journals/mr/HolzerSKGS07, added-at = {2019-06-02T00:00:00.000+0200}, author = {Holzer, Stefan and Sheikholeslami, Alireza and Karner, Markus and Grasser, Tibor and Selberherr, Siegfried}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/22fa00bc8a001dcf6e53ec6c94ecbcb48/dblp}, ee = {https://www.wikidata.org/entity/Q62600268}, interhash = {fc2f960b74965730fa9812b0c55271f9}, intrahash = {2fa00bc8a001dcf6e53ec6c94ecbcb48}, journal = {Microelectronics Reliability}, keywords = {dblp}, number = {4-5}, pages = {623-625}, timestamp = {2019-09-27T10:58:31.000+0200}, title = {Comparison of deposition models for a TEOS LPCVD process.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr47.html#HolzerSKGS07}, volume = 47, year = 2007 }