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%0 Journal Article
%1 pham2004photoresist
%A Pham, Nga Phuong
%A Boellaard, E.
%A Burghartz, Joachim N.
%A Sarro, Pasqualina M.
%C Piscataway, New Jersey
%D 2004
%I IEEE
%J Journal of Microelectromechanical Systems
%K INES firstnamemissing
%N 3
%P 491-499
%R 10.1109/JMEMS.2004.828728
%T Photoresist coating methods for the integration of novel 3-D RF microstructures
%V 13
@article{pham2004photoresist,
added-at = {2019-03-26T15:27:29.000+0100},
address = {Piscataway, New Jersey},
author = {Pham, Nga Phuong and Boellaard, E. and Burghartz, Joachim N. and Sarro, Pasqualina M.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2b5b0a5f9699845eeaf50d327b3fc124a/kevin.konnerth},
doi = {10.1109/JMEMS.2004.828728},
interhash = {1f7e0dec8e275b1ff570b7ba3513b8a3},
intrahash = {b5b0a5f9699845eeaf50d327b3fc124a},
issn = {{1057-7157} and {1941-0158}},
journal = {Journal of Microelectromechanical Systems},
keywords = {INES firstnamemissing},
month = jun,
number = 3,
pages = {491-499},
publisher = {IEEE},
timestamp = {2019-04-03T15:36:08.000+0200},
title = {Photoresist coating methods for the integration of novel 3-D RF microstructures},
volume = 13,
year = 2004
}
