%0 Thesis %1 angelopoulos2011characterization %A Angelopoulos, Evangelos %C Uelvesbüll %D 2011 %I Der Andere Verlag %K INES %T Characterization of Silicon Membrane Wafers and Optimization of their Process Stability for Ultra-Thin Chip Fabrication %@ 978-3-86247-229-1

@phdthesis{angelopoulos2011characterization, added-at = {2019-03-13T14:25:00.000+0100}, address = {Uelvesbüll}, author = {Angelopoulos, Evangelos}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2a98e95c8cf6e8e04af1f0293af435cff/kevin.konnerth}, institution = {Institut für Nano- und Mikroelektronische Systeme / Institut für Mikroelektronik Stuttgart}, interhash = {f6fc0c387b4e647cd9d2a040d7525b2d}, intrahash = {a98e95c8cf6e8e04af1f0293af435cff}, isbn = {978-3-86247-229-1}, keywords = {INES}, publisher = {Der Andere Verlag}, school = {Universität Stuttgart}, timestamp = {2019-03-13T13:25:00.000+0100}, title = {Characterization of Silicon Membrane Wafers and Optimization of their Process Stability for Ultra-Thin Chip Fabrication}, type = {Dissertation}, year = 2011 }