%0 Journal Article %1 journals/ibmrd/KoenigM00 %A Koenig, H. R. %A Maissel, Leon I. %D 2000 %J IBM Journal of Research and Development %K dblp %N 1 %P 106-111 %T Application of rf discharges to sputtering. %U http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd44.html#KoenigM00 %V 44

@article{journals/ibmrd/KoenigM00, added-at = {2012-09-21T00:00:00.000+0200}, author = {Koenig, H. R. and Maissel, Leon I.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/227494e631e7b461c148cf4219d6faeba/dblp}, ee = {http://dx.doi.org/10.1147/rd.441.0106}, interhash = {f26c34c6b269ccab8508910764ad3bef}, intrahash = {27494e631e7b461c148cf4219d6faeba}, journal = {IBM Journal of Research and Development}, keywords = {dblp}, number = 1, pages = {106-111}, timestamp = {2016-02-02T08:59:10.000+0100}, title = {Application of rf discharges to sputtering.}, url = {http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd44.html#KoenigM00}, volume = 44, year = 2000 }