%0 Journal Article %1 journals/mr/SchlangenLKLEB09 %A Schlangen, Rudolf %A Leihkauf, Reiner %A Kerst, Uwe %A Lundquist, Ted R. %A Egger, Peter %A Boit, Christian %D 2009 %J Microelectronics Reliability %K dblp %N 9-11 %P 1158-1164 %T Physical analysis, trimming and editing of nanoscale IC function with backside FIB processing. %U http://dblp.uni-trier.de/db/journals/mr/mr49.html#SchlangenLKLEB09 %V 49

@article{journals/mr/SchlangenLKLEB09, added-at = {2016-05-12T00:00:00.000+0200}, author = {Schlangen, Rudolf and Leihkauf, Reiner and Kerst, Uwe and Lundquist, Ted R. and Egger, Peter and Boit, Christian}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2925a4fea054298508613de30f5f75719/dblp}, ee = {http://dx.doi.org/10.1016/j.microrel.2009.06.048}, interhash = {eb1c363f0515292efe1d6743400259e4}, intrahash = {925a4fea054298508613de30f5f75719}, journal = {Microelectronics Reliability}, keywords = {dblp}, number = {9-11}, pages = {1158-1164}, timestamp = {2016-05-13T09:32:01.000+0200}, title = {Physical analysis, trimming and editing of nanoscale IC function with backside FIB processing.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr49.html#SchlangenLKLEB09}, volume = 49, year = 2009 }