%0 Conference Paper %1 conf/case/ZhuQZ15 %A Zhu, Qinghua %A Qiao, Yan %A Zhou, MengChu %B CASE %D 2015 %I IEEE %K dblp %P 292-297 %T Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools. %U http://dblp.uni-trier.de/db/conf/case/case2015.html#ZhuQZ15 %@ 978-1-4673-8183-3

@inproceedings{conf/case/ZhuQZ15, added-at = {2015-10-13T00:00:00.000+0200}, author = {Zhu, Qinghua and Qiao, Yan and Zhou, MengChu}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2493c1acdbacee3592f2f2d11a07dcbc3/dblp}, booktitle = {CASE}, crossref = {conf/case/2015}, ee = {http://dx.doi.org/10.1109/CoASE.2015.7294094}, interhash = {e1846a8081764949b2f74394d02dca04}, intrahash = {493c1acdbacee3592f2f2d11a07dcbc3}, isbn = {978-1-4673-8183-3}, keywords = {dblp}, pages = {292-297}, publisher = {IEEE}, timestamp = {2016-02-02T13:22:12.000+0100}, title = {Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools.}, url = {http://dblp.uni-trier.de/db/conf/case/case2015.html#ZhuQZ15}, year = 2015 }