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%0 Journal Article
%1 journals/tcad/HeitzingerHS03
%A Heitzinger, Clemens
%A Hössinger, Andreas
%A Selberherr, Siegfried
%D 2003
%J IEEE Trans. on CAD of Integrated Circuits and Systems
%K dblp
%N 7
%P 879-883
%T On smoothing three-dimensional Monte Carlo ion implantation simulation results.
%U http://dblp.uni-trier.de/db/journals/tcad/tcad22.html#HeitzingerHS03
%V 22
@article{journals/tcad/HeitzingerHS03,
added-at = {2019-06-02T00:00:00.000+0200},
author = {Heitzinger, Clemens and Hössinger, Andreas and Selberherr, Siegfried},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/252f5edad395a899b9dc642c77988bdf9/dblp},
ee = {https://www.wikidata.org/entity/Q62600409},
interhash = {ce98210ef3c86208871d164f077da912},
intrahash = {52f5edad395a899b9dc642c77988bdf9},
journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
keywords = {dblp},
number = 7,
pages = {879-883},
timestamp = {2019-09-27T08:26:59.000+0200},
title = {On smoothing three-dimensional Monte Carlo ion implantation simulation results.},
url = {http://dblp.uni-trier.de/db/journals/tcad/tcad22.html#HeitzingerHS03},
volume = 22,
year = 2003
}