%0 Conference Paper %1 conf/aspdac/DuZWC12 %A Du, Yuelin %A Zhang, Hongbo %A Wong, Martin D. F. %A Chao, Kai-Yuan %B ASP-DAC %D 2012 %I IEEE %K dblp %P 707-712 %T Hybrid lithography optimization with E-Beam and immersion processes for 16nm 1D gridded design. %U http://dblp.uni-trier.de/db/conf/aspdac/aspdac2012.html#DuZWC12 %@ 978-1-4673-0770-3

@inproceedings{conf/aspdac/DuZWC12, added-at = {2012-03-12T00:00:00.000+0100}, author = {Du, Yuelin and Zhang, Hongbo and Wong, Martin D. F. and Chao, Kai-Yuan}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c01d7b612052bd1cc66496dc1a8341a4/dblp}, booktitle = {ASP-DAC}, crossref = {conf/aspdac/2012}, ee = {http://dx.doi.org/10.1109/ASPDAC.2012.6165047}, interhash = {a6be6044010056eb60f5473538a2c38d}, intrahash = {c01d7b612052bd1cc66496dc1a8341a4}, isbn = {978-1-4673-0770-3}, keywords = {dblp}, pages = {707-712}, publisher = {IEEE}, timestamp = {2016-02-02T13:14:22.000+0100}, title = {Hybrid lithography optimization with E-Beam and immersion processes for 16nm 1D gridded design.}, url = {http://dblp.uni-trier.de/db/conf/aspdac/aspdac2012.html#DuZWC12}, year = 2012 }