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%0 Conference Paper
%1 conf/nems/AartsWS12
%A Aarts, M.
%A Wei, J.
%A Sarro, P. M.
%B NEMS
%D 2012
%I IEEE
%K dblp
%P 253-256
%T Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency.
%U http://dblp.uni-trier.de/db/conf/nems/nems2012.html#AartsWS12
%@ 978-1-4673-1122-9
@inproceedings{conf/nems/AartsWS12,
added-at = {2012-05-25T00:00:00.000+0200},
author = {Aarts, M. and Wei, J. and Sarro, P. M.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2161a20f8032104aa042c8186fbdafcb3/dblp},
booktitle = {NEMS},
crossref = {conf/nems/2012},
ee = {http://dx.doi.org/10.1109/NEMS.2012.6196768},
interhash = {69c8650547f49aad5d6be464b59c920d},
intrahash = {161a20f8032104aa042c8186fbdafcb3},
isbn = {978-1-4673-1122-9},
keywords = {dblp},
pages = {253-256},
publisher = {IEEE},
timestamp = {2016-02-02T15:30:59.000+0100},
title = {Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency.},
url = {http://dblp.uni-trier.de/db/conf/nems/nems2012.html#AartsWS12},
year = 2012
}
