%0 Journal Article %1 pham2005spray %A Pham, Nga Phuong %A Burghartz, Joachim N. %A Sarro, Pasqualina M. %C Bristol %D 2005 %I IOP Publishing %J Journal of Micromechanics and Microengineering %K INES %N 4 %P 691-697 %R 10.1088/0960-1317/15/4/003 %T Spray Coating of Photoresist for Pattern Transfer on High Topography Surfaces %U http://dx.doi.org/10.1088/0960-1317/15/4/003 %V 15

@article{pham2005spray, added-at = {2019-03-21T15:50:58.000+0100}, address = {Bristol}, author = {Pham, Nga Phuong and Burghartz, Joachim N. and Sarro, Pasqualina M.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2576abc1f2e053d4eb3389c1016bf0fb4/kevin.konnerth}, doi = {10.1088/0960-1317/15/4/003}, interhash = {6985b6c440fbec4832e8db744fd7aaf8}, intrahash = {576abc1f2e053d4eb3389c1016bf0fb4}, issn = {0960-1317}, journal = {Journal of Micromechanics and Microengineering}, keywords = {INES}, number = 4, pages = {691-697}, publisher = {IOP Publishing}, timestamp = {2019-03-26T15:21:26.000+0100}, title = {Spray Coating of Photoresist for Pattern Transfer on High Topography Surfaces}, url = {http://dx.doi.org/10.1088/0960-1317/15/4/003}, volume = 15, year = 2005 }