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%0 Journal Article
%1 journals/ibmrd/LiebmannMWLLD01
%A Liebmann, Lars
%A Mansfield, Scott M.
%A Wong, Alfred K.
%A Lavin, Mark A.
%A Leipold, William C.
%A Dunham, Timothy G.
%D 2001
%J IBM Journal of Research and Development
%K dblp
%N 5
%P 651-666
%T TCAD development for lithography resolution enhancement.
%U http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd45.html#LiebmannMWLLD01
%V 45
@article{journals/ibmrd/LiebmannMWLLD01,
added-at = {2012-09-21T00:00:00.000+0200},
author = {Liebmann, Lars and Mansfield, Scott M. and Wong, Alfred K. and Lavin, Mark A. and Leipold, William C. and Dunham, Timothy G.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c9035a704a419101e13200990ddebffb/dblp},
ee = {http://dx.doi.org/10.1147/rd.455.0651},
interhash = {67e7d692a75555d490d8a9f4190f9f10},
intrahash = {c9035a704a419101e13200990ddebffb},
journal = {IBM Journal of Research and Development},
keywords = {dblp},
number = 5,
pages = {651-666},
timestamp = {2016-02-02T08:59:10.000+0100},
title = {TCAD development for lithography resolution enhancement.},
url = {http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd45.html#LiebmannMWLLD01},
volume = 45,
year = 2001
}
