%0 Conference Paper %1 conf/wsc/WagnerSK12 %A Wagner, Thomas %A Schwenke, Clemens %A Kabitzsch, Klaus %B Winter Simulation Conference %D 2012 %E Rose, Oliver %E Uhrmacher, Adelinde M. %I WSC %K dblp %P 171:1-171:12 %T Modeling and wafer defect analysis in semiconductor automated material handling systems. %U http://dblp.uni-trier.de/db/conf/wsc/wsc2012.html#WagnerSK12 %@ 978-1-4673-4781-5

@inproceedings{conf/wsc/WagnerSK12, added-at = {2015-06-03T00:00:00.000+0200}, author = {Wagner, Thomas and Schwenke, Clemens and Kabitzsch, Klaus}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/27b3e4ce2b8dd5a092336fcd20088292a/dblp}, booktitle = {Winter Simulation Conference}, crossref = {conf/wsc/2012}, editor = {Rose, Oliver and Uhrmacher, Adelinde M.}, ee = {http://dl.acm.org/citation.cfm?id=2429988}, interhash = {1538dbf9d8f1a8102db9e369ff9563a5}, intrahash = {7b3e4ce2b8dd5a092336fcd20088292a}, isbn = {978-1-4673-4781-5}, keywords = {dblp}, pages = {171:1-171:12}, publisher = {WSC}, timestamp = {2016-02-02T11:11:43.000+0100}, title = {Modeling and wafer defect analysis in semiconductor automated material handling systems.}, url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2012.html#WagnerSK12}, year = 2012 }