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%0 Journal Article
%1 journals/mr/LloydLLLSHR04
%A Lloyd, J. R.
%A Lane, M. R.
%A Liu, X.-H.
%A Liniger, E.
%A Shaw, T. M.
%A Hu, C.-K.
%A Rosenberg, R.
%D 2004
%J Microelectronics Reliability
%K dblp
%N 9-11
%P 1835-1841
%T Reliability Challenges with Ultra-Low k Interlevel Dielectrics.
%U http://dblp.uni-trier.de/db/journals/mr/mr44.html#LloydLLLSHR04
%V 44
@article{journals/mr/LloydLLLSHR04,
added-at = {2015-02-05T00:00:00.000+0100},
author = {Lloyd, J. R. and Lane, M. R. and Liu, X.-H. and Liniger, E. and Shaw, T. M. and Hu, C.-K. and Rosenberg, R.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2d8f04e77dd13f8544c9be08901c0636c/dblp},
ee = {http://dx.doi.org/10.1016/j.microrel.2004.07.094},
interhash = {51f2fe1a37be031b927f702f8ccf17ea},
intrahash = {d8f04e77dd13f8544c9be08901c0636c},
journal = {Microelectronics Reliability},
keywords = {dblp},
number = {9-11},
pages = {1835-1841},
timestamp = {2016-02-02T01:59:33.000+0100},
title = {Reliability Challenges with Ultra-Low k Interlevel Dielectrics.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr44.html#LloydLLLSHR04},
volume = 44,
year = 2004
}
