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%0 Conference Paper
%1 conf/icmens/BednarzikSBSL03
%A Bednarzik, Martin
%A Scheunemann, Heinz-Ulrich
%A Barth, Alexander
%A Schondelmaier, Daniel
%A Loechel, Bernd
%B ICMENS
%D 2003
%I IEEE Computer Society
%K dblp
%P 177-
%T First Results in Patterning of Ultra High Aspect Ratio Microstructures by a 4T Wave Length Shifter at BESSY.
%U http://dblp.uni-trier.de/db/conf/icmens/icmens2003.html#BednarzikSBSL03
%@ 0-7695-1947-4
@inproceedings{conf/icmens/BednarzikSBSL03,
added-at = {2014-10-22T00:00:00.000+0200},
author = {Bednarzik, Martin and Scheunemann, Heinz-Ulrich and Barth, Alexander and Schondelmaier, Daniel and Loechel, Bernd},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/22c04a4e8e28c0617944a04455db2be00/dblp},
booktitle = {ICMENS},
crossref = {conf/icmens/2003},
ee = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2003.1221989},
interhash = {32c1b660769553f7a754485d86d0b52d},
intrahash = {2c04a4e8e28c0617944a04455db2be00},
isbn = {0-7695-1947-4},
keywords = {dblp},
pages = {177-},
publisher = {IEEE Computer Society},
timestamp = {2016-02-02T16:41:40.000+0100},
title = {First Results in Patterning of Ultra High Aspect Ratio Microstructures by a 4T Wave Length Shifter at BESSY.},
url = {http://dblp.uni-trier.de/db/conf/icmens/icmens2003.html#BednarzikSBSL03},
year = 2003
}
