%0 Conference Paper %1 conf/isqed/ParkCRKPJPKYK02 %A Park, Chul-Hong %A Choi, Soo-Han %A Rhie, Sang-Uhk %A Kim, Dong-Hyun %A Park, Jun-Seong %A Jang, Tae-Hwang %A Park, Ji-Soong %A Kim, Yoo-Hyon %A Yoo, Moon-Hyun %A Kong, Jeong-Taek %B ISQED %D 2002 %I IEEE Computer Society %K dblp %P 143-147 %T A Hybrid PPC Method Based on the Empirical Etch Model for the 0.14µm DRAM Generation and Beyond. %U http://dblp.uni-trier.de/db/conf/isqed/isqed2002.html#ParkCRKPJPKYK02 %@ 0-7695-1561-4

@inproceedings{conf/isqed/ParkCRKPJPKYK02, added-at = {2014-09-26T00:00:00.000+0200}, author = {Park, Chul-Hong and Choi, Soo-Han and Rhie, Sang-Uhk and Kim, Dong-Hyun and Park, Jun-Seong and Jang, Tae-Hwang and Park, Ji-Soong and Kim, Yoo-Hyon and Yoo, Moon-Hyun and Kong, Jeong-Taek}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/28c95f58c013841e9dac66114f7c0d34b/dblp}, booktitle = {ISQED}, crossref = {conf/isqed/2002}, ee = {http://dx.doi.org/10.1109/ISQED.2002.996717}, interhash = {2e0e654d3326ebee6394b40d90d99cca}, intrahash = {8c95f58c013841e9dac66114f7c0d34b}, isbn = {0-7695-1561-4}, keywords = {dblp}, pages = {143-147}, publisher = {IEEE Computer Society}, timestamp = {2016-02-02T13:52:52.000+0100}, title = {A Hybrid PPC Method Based on the Empirical Etch Model for the 0.14µm DRAM Generation and Beyond.}, url = {http://dblp.uni-trier.de/db/conf/isqed/isqed2002.html#ParkCRKPJPKYK02}, year = 2002 }