%0 Journal Article %1 journals/mr/BeaudoinLFDP04 %A Beaudoin, Felix %A López, J. %A Faucon, M. %A Desplats, Romain %A Perdu, Philippe %D 2004 %J Microelectronics Reliability %K dblp %N 9-11 %P 1605-1609 %T Femtosecond Laser Ablation for Backside Silicon Thinning. %U http://dblp.uni-trier.de/db/journals/mr/mr44.html#BeaudoinLFDP04 %V 44

@article{journals/mr/BeaudoinLFDP04, added-at = {2015-02-05T00:00:00.000+0100}, author = {Beaudoin, Felix and López, J. and Faucon, M. and Desplats, Romain and Perdu, Philippe}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29bcdf36520bec51ada428b4aa111a905/dblp}, ee = {http://dx.doi.org/10.1016/j.microrel.2004.07.077}, interhash = {2b60a801fc25f1c391a8cd1bc05959f6}, intrahash = {9bcdf36520bec51ada428b4aa111a905}, journal = {Microelectronics Reliability}, keywords = {dblp}, number = {9-11}, pages = {1605-1609}, timestamp = {2016-02-02T01:59:33.000+0100}, title = {Femtosecond Laser Ablation for Backside Silicon Thinning.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr44.html#BeaudoinLFDP04}, volume = 44, year = 2004 }