%0 Journal Article %1 journals/mr/AtanassovaSP07 %A Atanassova, Elena %A Spassov, D. %A Paskaleva, Albena %D 2007 %J Microelectronics Reliability %K dblp %N 12 %P 2088-2093 %T Metal gates and gate-deposition-induced defects in Ta2O5 stack capacitors. %U http://dblp.uni-trier.de/db/journals/mr/mr47.html#AtanassovaSP07 %V 47

@article{journals/mr/AtanassovaSP07, added-at = {2015-02-06T00:00:00.000+0100}, author = {Atanassova, Elena and Spassov, D. and Paskaleva, Albena}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2e4b8e235f7e48c7cdf6b81ba9dab26b2/dblp}, ee = {http://dx.doi.org/10.1016/j.microrel.2006.10.001}, interhash = {27fa6ee0ac77b91228db42579e76ff2a}, intrahash = {e4b8e235f7e48c7cdf6b81ba9dab26b2}, journal = {Microelectronics Reliability}, keywords = {dblp}, number = 12, pages = {2088-2093}, timestamp = {2016-02-02T01:59:54.000+0100}, title = {Metal gates and gate-deposition-induced defects in Ta2O5 stack capacitors.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr47.html#AtanassovaSP07}, volume = 47, year = 2007 }