%0 Conference Paper %1 conf/icetet/MiyamotoHMKFM12 %A Miyamoto, Asei %A Hashimoto, Taichi %A Makimura, Kenichi %A Kanda, Kensuke %A Fujita, Takayuki %A Maenaka, Kazusuke %B ICETET %D 2012 %I IEEE %K dblp %P 66-69 %T Wafer Level Packaging for MEMS Geiger Counter. %U http://dblp.uni-trier.de/db/conf/icetet/icetet2012.html#MiyamotoHMKFM12 %@ 978-1-4799-0276-7

@inproceedings{conf/icetet/MiyamotoHMKFM12, added-at = {2013-04-10T00:00:00.000+0200}, author = {Miyamoto, Asei and Hashimoto, Taichi and Makimura, Kenichi and Kanda, Kensuke and Fujita, Takayuki and Maenaka, Kazusuke}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2a070278d98764dc42fdda7f08a0c7e3b/dblp}, booktitle = {ICETET}, crossref = {conf/icetet/2012}, ee = {http://dx.doi.org/10.1109/ICETET.2012.20}, interhash = {22ca11191b5a0c1fe622712fa9b6f005}, intrahash = {a070278d98764dc42fdda7f08a0c7e3b}, isbn = {978-1-4799-0276-7}, keywords = {dblp}, pages = {66-69}, publisher = {IEEE}, timestamp = {2016-02-02T13:03:26.000+0100}, title = {Wafer Level Packaging for MEMS Geiger Counter.}, url = {http://dblp.uni-trier.de/db/conf/icetet/icetet2012.html#MiyamotoHMKFM12}, year = 2012 }