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%0 Conference Paper
%1 binz-idadfms2004
%A Binz, Hansgeorg
%A Watty, Robert
%A Kück, H.
%A Warkentin, D.
%A Benz, D.
%B Eurosensensors XVIII
%D 2004
%K 2004 IKTD KT Tagungsbeitrag
%T Improved Design And Development For MEMS Sensors
@inproceedings{binz-idadfms2004,
added-at = {2019-02-26T09:47:21.000+0100},
author = {Binz, Hansgeorg and Watty, Robert and Kück, H. and Warkentin, D. and Benz, D.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2e418a403de12f948a4c5ed8ead3a3056/iktd_group},
booktitle = {Eurosensensors XVIII},
eventtitle = {Eurosensensors XVIII},
interhash = {120a25236d7c83141a3e4099a7b335b2},
intrahash = {e418a403de12f948a4c5ed8ead3a3056},
keywords = {2004 IKTD KT Tagungsbeitrag},
language = {english},
timestamp = {2019-10-01T12:31:54.000+0200},
title = {Improved Design And Development For MEMS Sensors},
year = 2004
}