%0 Conference Paper %1 conf/ica3pp/SchneiderBSHF12 %A Schneider, Max %A Belic, Nikola %A Sambale, Christoph %A Hofmann, Ulrich %A Fey, Dietmar %B ICA3PP (1) %D 2012 %E Xiang, Yang %E Stojmenovic, Ivan %E Apduhan, Bernady O. %E Wang, Guojun %E Nakano, Koji %E Zomaya, Albert Y. %I Springer %K dblp %P 41-55 %T Optimization of a Short-Range Proximity Effect Correction Algorithm in E-Beam Lithography Using GPGPUs. %U http://dblp.uni-trier.de/db/conf/ica3pp/ica3pp2012-1.html#SchneiderBSHF12 %V 7439 %@ 978-3-642-33077-3

@inproceedings{conf/ica3pp/SchneiderBSHF12, added-at = {2017-05-26T00:00:00.000+0200}, author = {Schneider, Max and Belic, Nikola and Sambale, Christoph and Hofmann, Ulrich and Fey, Dietmar}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/24afea8247e14d92284a2c1f172347f19/dblp}, booktitle = {ICA3PP (1)}, crossref = {conf/ica3pp/2012-1}, editor = {Xiang, Yang and Stojmenovic, Ivan and Apduhan, Bernady O. and Wang, Guojun and Nakano, Koji and Zomaya, Albert Y.}, ee = {https://doi.org/10.1007/978-3-642-33078-0_4}, interhash = {0c658055521ccb2ce7046de933c8bd97}, intrahash = {4afea8247e14d92284a2c1f172347f19}, isbn = {978-3-642-33077-3}, keywords = {dblp}, pages = {41-55}, publisher = {Springer}, series = {Lecture Notes in Computer Science}, timestamp = {2019-09-27T16:53:42.000+0200}, title = {Optimization of a Short-Range Proximity Effect Correction Algorithm in E-Beam Lithography Using GPGPUs.}, url = {http://dblp.uni-trier.de/db/conf/ica3pp/ica3pp2012-1.html#SchneiderBSHF12}, volume = 7439, year = 2012 }