%0 Journal Article %1 Hooshmand_2025 %A Hooshmand, Helia %A Pahl, Tobias %A Hansen, Poul-Erik %A Fu, Liwei %A Birk, Alexander %A Karamehmedović, Mirza %A Lehmann, Peter %A Reichelt, Stephan %A Leach, Richard %A Piano, Samanta %D 2025 %I Elsevier BV %J Journal of Computational Physics %K alexander_birk hms ito journal liwei_fu stephan_reichelt %P 113519 %R 10.1016/j.jcp.2024.113519 %T Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology %U http://dx.doi.org/10.1016/j.jcp.2024.113519 %V 521

@article{Hooshmand_2025, added-at = {2025-03-13T14:41:47.000+0100}, author = {Hooshmand, Helia and Pahl, Tobias and Hansen, Poul-Erik and Fu, Liwei and Birk, Alexander and Karamehmedović, Mirza and Lehmann, Peter and Reichelt, Stephan and Leach, Richard and Piano, Samanta}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c655978d72dd7b1fae8f0f2bb667aa31/steinbeisser}, doi = {10.1016/j.jcp.2024.113519}, interhash = {0449ce3b05feb2e5cd02e84e9de45d77}, intrahash = {c655978d72dd7b1fae8f0f2bb667aa31}, issn = {0021-9991}, journal = {Journal of Computational Physics}, keywords = {alexander_birk hms ito journal liwei_fu stephan_reichelt}, month = jan, pages = 113519, publisher = {Elsevier BV}, timestamp = {2025-05-19T10:56:33.000+0200}, title = {Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology}, url = {http://dx.doi.org/10.1016/j.jcp.2024.113519}, volume = 521, year = 2025 }