%0 Conference Paper %1 sandmaier1990piezoresistive %A Sandmaier, Hermann %B Micro-system technologies 90 %C Berlin %D 1990 %E Reichl, Herbert %I Springer %K %P 581-586 %T Piezoresistive pressure sensors representing the 2nd generation avoid the physical limits based on conventional designs %X A novel design of piezoresistive, low-pressure sensors is presented. This design exhibits a number of advantages compared to the conventional. The main objective of this development was realizing a sensor with high sensitivity, high pressure overload, and low nonlinearity. This paper describes the theory for the design of the piezoresistive low pressure sensor. Through the application of a square diaphragm bossed in the center, a piezoresistive low pressure sensor for the pressure range of plus minus 10 kPa could be realized, exhibiting excellent sensitivity and low nonlinearity of 35 mV/V F. S. O. and 0,05 % respectively. %@ 978-3-642-45680-0 and 0-387-53025-8 and 3-540-53025-8

@inproceedings{sandmaier1990piezoresistive, abstract = {A novel design of piezoresistive, low-pressure sensors is presented. This design exhibits a number of advantages compared to the conventional. The main objective of this development was realizing a sensor with high sensitivity, high pressure overload, and low nonlinearity. This paper describes the theory for the design of the piezoresistive low pressure sensor. Through the application of a square diaphragm bossed in the center, a piezoresistive low pressure sensor for the pressure range of plus minus 10 kPa could be realized, exhibiting excellent sensitivity and low nonlinearity of 35 mV/V F. S. O. and 0,05 % respectively.}, added-at = {2023-09-01T10:43:03.000+0200}, address = {Berlin}, author = {Sandmaier, Hermann}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c97a62030c7696e91da7035962682707/unibiblio-4}, booktitle = {Micro-system technologies 90}, editor = {Reichl, Herbert}, eventdate = {1990-09-10/1990-09-13}, eventtitle = {1st International Conference on Micro, Electro, Opto, Mechanic Systems and Components}, interhash = {06f3a446c64ee800777ed22d38d8cb8e}, intrahash = {c97a62030c7696e91da7035962682707}, isbn = {{978-3-642-45680-0} and {0-387-53025-8} and {3-540-53025-8}}, keywords = {}, language = {eng}, pages = {581-586}, publisher = {Springer}, timestamp = {2023-09-01T08:43:03.000+0200}, title = {Piezoresistive pressure sensors representing the 2nd generation avoid the physical limits based on conventional designs}, venue = {Berlin}, year = 1990 }