%0 Journal Article %1 drodofsky1997nanometerscale %A Drodofsky, U. %A Stuhler, J. %A Brezger, B. %A Schulze, Th. %A Drewsen, M. %A Pfau, T. %A Mlynek, J. %D 1997 %J Microelectronic Engineering %K Pi5 SFB_TRR21_A1 myown %P 285 %T Nanometerscale lithography with chromiunm atoms using light forces %V 35

@article{drodofsky1997nanometerscale, added-at = {2018-12-05T16:40:53.000+0100}, author = {Drodofsky, U. and Stuhler, J. and Brezger, B. and Schulze, Th. and Drewsen, M. and Pfau, T. and Mlynek, J.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29c62bd3d6f694acc6d0ae8c2259ef1de/pi5}, day = 01, interhash = {05efd65c589e2e021266474ba43c3c2a}, intrahash = {9c62bd3d6f694acc6d0ae8c2259ef1de}, journal = {Microelectronic Engineering}, keywords = {Pi5 SFB_TRR21_A1 myown}, month = {01}, pages = 285, timestamp = {2018-12-05T15:42:58.000+0100}, title = {Nanometerscale lithography with chromiunm atoms using light forces}, volume = 35, year = 1997 }