PUMA publications for /tag/diffraction%20interference_lithography%20algorithm%20interferencehttps://puma.ub.uni-stuttgart.de/tag/diffraction%20interference_lithography%20algorithm%20interferencePUMA RSS feed for /tag/diffraction%20interference_lithography%20algorithm%20interference2026-04-04T01:00:07+02:00- Theoretical investigation on the elimination of the period chirp by deliberate substrate deformationshttps://puma.ub.uni-stuttgart.de/bibtex/28369a5b0b9c1d5b9bd78f25cc22c6d13/florianbienertflorianbienert2022-06-09T10:04:50+02:00LIL algorithm chirp diffraction diffraction_grating grating interference interference_lithography myown peer therory <span data-person-type="author" class="authorEditorList "><span><span itemtype="http://schema.org/Person" itemscope="itemscope" itemprop="author"><a title="Florian Bienert" itemprop="url" href="/person/1503e2f12069fc6f23a499ccd4bb69f64/author/0"><span itemprop="name">F. Bienert</span></a></span>, </span><span><span itemtype="http://schema.org/Person" itemscope="itemscope" itemprop="author"><a title="Thomas Graf" itemprop="url" href="/person/1503e2f12069fc6f23a499ccd4bb69f64/author/1"><span itemprop="name">T. Graf</span></a></span>, </span> und <span><span itemtype="http://schema.org/Person" itemscope="itemscope" itemprop="author"><a title="Marwan Abdou Ahmed" itemprop="url" href="/person/1503e2f12069fc6f23a499ccd4bb69f64/author/2"><span itemprop="name">M. Abdou Ahmed</span></a></span></span>. </span><span class="additional-entrytype-information"><span itemtype="http://schema.org/PublicationIssue" itemscope="itemscope" itemprop="isPartOf"><em><span itemprop="journal">Optics Express</span>, </em> <em><span itemtype="http://schema.org/PublicationVolume" itemscope="itemscope" itemprop="isPartOf"><span itemprop="volumeNumber">30 </span></span>(<span itemprop="issueNumber">13</span>):
<span itemprop="pagination">22410</span></em> </span>(<em><span>Juni 2022<meta content="Juni 2022" itemprop="datePublished"/></span></em>)</span>
- Theoretical investigation on the elimination of the period chirp by deliberate substrate deformationshttps://puma.ub.uni-stuttgart.de/bibtex/28369a5b0b9c1d5b9bd78f25cc22c6d13/ifswifsw2022-06-09T10:04:50+02:00myown chirp diffraction diffraction_grating interference_lithography LIL from:florianbienert grating peer interference therory algorithm <span data-person-type="author" class="authorEditorList "><span><span itemtype="http://schema.org/Person" itemscope="itemscope" itemprop="author"><a title="Florian Bienert" itemprop="url" href="/person/1503e2f12069fc6f23a499ccd4bb69f64/author/0"><span itemprop="name">F. Bienert</span></a></span>, </span><span><span itemtype="http://schema.org/Person" itemscope="itemscope" itemprop="author"><a title="Thomas Graf" itemprop="url" href="/person/1503e2f12069fc6f23a499ccd4bb69f64/author/1"><span itemprop="name">T. Graf</span></a></span>, </span> und <span><span itemtype="http://schema.org/Person" itemscope="itemscope" itemprop="author"><a title="Marwan Abdou Ahmed" itemprop="url" href="/person/1503e2f12069fc6f23a499ccd4bb69f64/author/2"><span itemprop="name">M. Abdou Ahmed</span></a></span></span>. </span><span class="additional-entrytype-information"><span itemtype="http://schema.org/PublicationIssue" itemscope="itemscope" itemprop="isPartOf"><em><span itemprop="journal">Optics Express</span>, </em> <em><span itemtype="http://schema.org/PublicationVolume" itemscope="itemscope" itemprop="isPartOf"><span itemprop="volumeNumber">30 </span></span>(<span itemprop="issueNumber">13</span>):
<span itemprop="pagination">22410</span></em> </span>(<em><span>Juni 2022<meta content="Juni 2022" itemprop="datePublished"/></span></em>)</span>