Publications

David A. Litton, and Stephen H. Garofalini. Modeling of hydrophilic wafer bonding by molecular dynamics simulations. Journal of Applied Physics, (89)11:6013--6023, AIP, June 2001. [PUMA: adhesion, adsorbed amorphous angles bond bonding, bonds, compounds, dynamics hydrogen layers, method, moisture, molecular monolayers, silicon state, surface treatment, wafer water,]