Publications

J. Zimmermann, und O. Sawodny. Modelling and Control of a X-Y-Fine Positioning Table. Ilmenauer Wissenschafliches Kolloquium (IWK), 2007. [PUMA: Friction ISYS Measurement Nano]

J. Zimmermann, und O. Sawodny. Modeling for Simulation and Control of a X-Y High Precision Positioning Table. IEEE Conference on Automation Science and Engineering, 1093--1097, Scottsdale, USA, 2007. [PUMA: Friction ISYS Measurement Nano]

J. Zimmermann, O. Sawodny, T. Hausotte, und G. Jäger. Friction Modelling for Control of a Linear High Precision Actuator. IFAC Symposium on Mechatronic Systems, 461--466, Heidelberg, Germany, 2006. [PUMA: Friction ISYS Measurement Nano]

J. Zimmermann, Sawodny Oliver, Lyda Wolfram, und Osten Wolfgang. Model-Based Control of a High-Precision Measurement Machine for Multiscale Inspection Tasks. IFAC Symposium on Mechatronic Systems, (43)18:545--551, IFAC Proceeedings Volumes, Cambridge, MA, USA, September 2010. [PUMA: Friction ISYS Measurement Nano]

W. Lyda, A. Burla, T. Haist, J. Zimmermann, W. Osten, und O. Sawodny. Automated Multi-Scale Measurement System for MEMS-Characterization. SPIE Conference on Optical Micro- and Nanometrology, 2010. [PUMA: Friction ISYS Measurement Nano]