Theoretical investigation on the elimination of the period chirp by deliberate substrate deformations. Optics Express, (30)13:22410, Optica Publishing Group, June 2022. [PUMA: LIL algorithm chirp diffraction diffraction_grating grating interference interference_lithography myown peer therory] URL
Theoretical investigation on the elimination of the period chirp by deliberate substrate deformations. Optics Express, (30)13:22410, Optica Publishing Group, June 2022. [PUMA: myown chirp diffraction diffraction_grating interference_lithography LIL from:florianbienert grating peer interference therory algorithm] URL
Comprehensive theoretical analysis of the period chirp in laser interference lithography. Appl. Opt., (61)9:2313--2326, OSA, March 2022. [PUMA: chirp period Interference diffraction_grating Laser_beam ltihography interference_lithography from:florianbienert ifsw Diffraction grating] URL
Comprehensive theoretical analysis of the period chirp in laser interference lithography. Appl. Opt., (61)9:2313--2326, OSA, March 2022. [PUMA: Diffraction Interference Laser_beam chirp diffraction_grating grating ifsw interference_lithography ltihography period] URL