Comprehensive theoretical analysis of the period chirp in laser interference lithography. Appl. Opt., (61)9:2313--2326, OSA, März 2022. [PUMA: chirp period Interference diffraction_grating Laser_beam ltihography interference_lithography from:florianbienert ifsw Diffraction grating] URL
Comprehensive theoretical analysis of the period chirp in laser interference lithography. Appl. Opt., (61)9:2313--2326, OSA, März 2022. [PUMA: Diffraction Interference Laser_beam chirp diffraction_grating grating ifsw interference_lithography ltihography period] URL