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Device design issues for a high-performance technology with Si or SiGe epitaxial base

, , , , , , , and . Microelectronic Engineering, 15 (1-4): 11-14 (October 1991)
DOI: 10.1016/0167-9317(91)90172-A

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Novel Bipolar Transistor Isolation Structure Using Combined Selective Epitaxial Growth and Planarization Technique, , , , , , , , , and 2 other author(s). Proceedings of the 22nd European Solid State Device Research Conference Leuven, 14-17 September 1992, page 531-534. Amsterdam, Elsevier, (1992)SPIRIT : A Bipolar/BiCMOS Isolation Technology For High-Performance VLSI, , , , , , , , and . Digest of technical papers : 1993 Symposium on VLSI Technology : May 17 - 19, 1993, Kyoto, page 143-144. Piscataway, New Jersey, IEEE, (1993)A Full E-Beam 0.25 um Bipolar Technology With Sub-25 Ps ECL Gate Delay, , , , , , , , , and 4 other author(s). International Electron Devices Meeting (1991 : Washington, DC), page 956-958. Piscataway, New Jersey, IEEE, (1991)SiGe Heterojunction Bipolar Transistors, , , , , , and . (1990)Novel In-Situ Doped Polysilicon Emitter Process With Buried Diffusion Source (BDS), , , , , , , and . IEEE Electron Device Letters, 12 (12): 679-681 (December 1991)Self-aligned bipolar epitaxial base n-p-n transistors by selective epitaxy emitter window (SEEW) technology, , , , , , , and . IEEE Transactions on Electron Devices, 38 (2): 378-385 (February 1991)Single Crystal Emitter Cap for Epitaxial Si- And SiGe-Base Transistors, , , , , , , , , and . International Electron Devices Meeting (1991 : Washington, DC), page 857-860. Piscataway, New Jersey, IEEE, (1991)Self-aligned bipolar npn transistor with 60 nm epitaxial base, , , , , and . Technical digest : International Electron Devices Meeting 1989, IEDM, Washington, D.C. December 3 - 6, 1989, page 229-232. Piscataway, New Jersey, IEEE, (1989)Device design issues for a high-performance technology with Si or SiGe epitaxial base, , , , , , , and . Microelectronic Engineering, 15 (1-4): 11-14 (October 1991)Sub-30 Ps ECL Circuits Using High-F-Sub-T Si and SiGe Epitaxial Base Transistors, , , , , , , , , and 3 other author(s). Electron Devices Meeting, 1990 : IEDM '90 : Technical Digest : International, page 297-300. Piscataway, New Jersey, IEEE, (1990)