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A silicon rate gyroscope with decoupled driving and sensing mechanismen

, , , , and . Symposium Gyro-Technology 1998, Stuttgart, (1998)

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A new silicon rate gyroscope, , , , and . Sensors and actuators. A, Physical, 73 (1/2): 45-51 (1999)New digital readout electronics for capacitive sensors by the example of micro-machined gyroscopes, , , , , , , , and . Selected papers from Eurosenors XV, 97/98, page 557-562. Amsterdam, Elsevier, (2002)Decoupled microgyros and the design principle DAVED, , , , , , , , , and . Papers from the Proceedings of the 14th IEEE Internat. Conf. on MicroElectroMechanical Systems (MEMS 2001), 95, 2/3, page 239-249. Amsterdam, Elsevier, (2002)DAVED-LL - A Novel Gyroscope in SOI-Technology, , , , , , , , and . Ortung und Navigation, (2001)Improved rate gyroscope designs designated for fabrication by modern deep silicon etching, , , and . Symposium Gyro-Technology 1997, page 2. Stuttgart, Universitat Stuttgart, Institut A für Mechanik, (1997)The Silicon Angular Rate Sensor MARS-RR, , , and . Sensor 99 : proceedings, 2, page 59-64. Wunstorf, AMA Service, (1999)Low cost micromachined gyroscope in SOI-Technology, , , , , , , , , and . Advanced microsystems for automotive applications, Berlin, Springer, (2002)New designs of micromachined rate gyroscopes with improved sensitivity through decoupled oscillation modes, , , , and . Sensor 97 : proceedings, 1, page 193-198. Wunstorf, ACS Organisations, (1997)A mechanically controlled oscillator, , and . Transducers '99, 82, 1/3, page 74-78. Amsterdam, Elsevier, (2000)A silicon rate gyroscope with decoupled driving and sensing mechanismen, , , , and . Symposium Gyro-Technology 1998, Stuttgart, (1998)