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Rationelle Simulation mikro-elektro-mechanischer Systeme unter Einsatz von FEM und Systemsimulationssoftware

B. Folkmer, B. Prillwitz, H. Sandmaier, and W. Lang. 16. CAD-FEM User's Meeting, Bad Neuenahr-Ahrweiler, Grafing bei München, CAD-FEM GmbH, (1998)

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Dr. rer. nat. Nicolai Lang University of Stuttgart

Lukas Lang University of Stuttgart

Jeremias Lange University of Stuttgart

Pia Lena Lange University of Stuttgart

Konrad Langenbeck

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A Temperature Compensation Circuit for Thermal Flow Sensors Operated in Constant-Temperature-Difference Mode.C. Sosna, R. Buchner, and W. Lang. IEEE Trans. Instrumentation and Measurement, 59 (6): 1715-1721 (2010)Multi level coupled simulations for MEMS designB. Folkmer, N. Hey, H. Sandmaier, and W. Lang. Proceedings of Eurosensors X, 5, page 1357-1360. Heverlee, Belgium, Catholic University Leuven, (1996)a.SiC films: deposition and application in silicon micromachiningA. Klumpp, K. Kühl, W. Lang, H. Sandmaier, and U. Schaber. Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, page 289-298. Berlin, VDE-Verl., (1994)Micromachined inclinometer with high sensitivity and very good stabilityS. Billat, H. Glosch, M. Kunze, F. Hedrich, J. Frech, J. Auber, H. Sandmaier, W. Wimmer, and W. Lang. Sensors and Actuators. A, Physical, (2002)Anisotropic conductive adhesion of microsensors applied in the instance of a low pressure sensorR. Briegel, M. Ashauer, H. Ashauer, S. Hermann, and W. Lang. Sensors and actuators. A Physical, (2002)Cross-coupling of the oscillation modes of vibratory gyroscopesM. Braxmaier, A. Gaisser, T. Link, A. Schumacher, I. Simon, J. Frech, H. Sandmaier, and W. Lang. Transducers '03 : digest of technical papers, 1, page 167-170. Piscataway, NJ, IEEE, (2003)Digital readout electronics for micro-machined gyroscope with enhanced sensor designA. Gaißer, T. Link, M. Braxmeier, B. Zhou, A. Schumacher, H. Sandmaier, and W. Lang. Symposium Gyro-Technology 2002, Stuttgart, Inst. A für Mechanik, (2002)Software optimisation of digital readout electronics for micro-machined gyroscopesB. Zhou, Z. GaoA, A. Gaißer, T. Link, M. Braxmeier, A. Schuhmacher, H. Sandmaier, and W. Lang. Symposium Gyro-Technology 2002, Stuttgart, Inst. A für Mechanik, (2002)Rationelle Simulation mikro-elektro-mechanischer Systeme unter Einsatz von FEM und SystemsimulationssoftwareB. Folkmer, B. Prillwitz, H. Sandmaier, and W. Lang. 16. CAD-FEM User's Meeting, Bad Neuenahr-Ahrweiler, Grafing bei München, CAD-FEM GmbH, (1998)Anisotropic conductive adhesion of microsensors applied in the instance of a low pressure sensorR. Briegel, M. Ashauer, H. Ashauer, S. Hermann, and W. Lang. Transducers '01 Eurosensors XV : digest of technical papers, 1, page 210-213. Berlin, Springer, (2001)