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Rationelle Simulation mikro-elektro-mechanischer Systeme unter Einsatz von FEM und Systemsimulationssoftware

, , , and . 16. CAD-FEM User's Meeting, Bad Neuenahr-Ahrweiler, Grafing bei München, CAD-FEM GmbH, (1998)

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Rationelle Simulation mikro-elektro-mechanischer Systeme unter Einsatz von FEM und Systemsimulationssoftware, , , and . 16. CAD-FEM User's Meeting, Bad Neuenahr-Ahrweiler, Grafing bei München, CAD-FEM GmbH, (1998)