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Compensation of Convex Corners in aqueous KOH-Etching, , , and . Micro system technologies 91 : 2nd International Conference on Micro Electro, Opto, Mechanical Systems and Components, page 332-337. Berlin, vde-Verl., (1991)Bulk micromachining using doping dependent p-n junction etch-stop, , , , , and . Proceedings of the Second International Symposium on Electrochemical Technology Applications in Electronics, 93-20, page 257-264. Pennington, NJ, Electrochemical Society, (1993)Messung der Temperaturleitfähigkeit der Elektronik, and . Verbindungstechnik in der Elektronik : Vorträge und Poster-Beiträge des 6. Internationalen Kolloquiums, 141, Düsseldorf, DVS-Verl., (1992)A simulation tool for mechanical sensor design, , , , , , and . Proceedings of Eurosensors V, volume 4 of Sensors and actuators. A, Physical, page 521-524. Lausanne, Elsevier Sequoia, (1992)Stressfreie Chipmontage für Bauelemente der MST, and . Verbindungstechnik in der Elektronik : Vorträge und Poster-Beiträge des 6. Internationalen Kolloquiums, 141, Düsseldorf, DVS-Verl., (1992)Stressfreie Chipmontage, and . Mikro-Elektronik, (1990)Study of doping dependent p-n junction etch-stop using pulsed electrochemical anodization, , , , , and . (1992)Von anwendungsspezifischen Schaltungen (ASIC's) zu anwendungsspezifischen integrierten Systemen (ASIS), and . Technische Rundschau, (1994)TPS10 als Basis für ein Tool zum Design von Drucksensoren, , , , , and . Finite Elemente in der Praxis : computergestütztes Berechnen und Konstruieren, Reutlingen, T-Programm GmbH, (1991)Methods for the fabrication of convex corners in anisotropic etching of (100) silicon in aqueous KOH, , and . Proceedings of Eurosensors IV held jointly with Sensoren, Technologie und Anwendung, 25, 1/3, page 9-13. Lausanne, Elsevier Sequoia, (1991)