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Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning, , , , and . Sensors, (2021)Absorbing layers for thermal infrared detectors, , and . Transducers '91 : digest of technical papers, page 635-638. New York, NY, IEEE, (1991)Microdosage of Liquids by a free jet comprising extraordinary operating range, , , , and . Screentech 2000, Southborough, MA, International Business Communications, (2000)Energy optimized valve with low leakage rates, , , , , and . Proc. IMECE 2000, (2000)Compensation of Convex Corners in aqueous KOH-Etching, , , and . Micro system technologies 91 : 2nd International Conference on Micro Electro, Opto, Mechanical Systems and Components, page 332-337. Berlin, vde-Verl., (1991)A Microvalve with bidirectional pump effect, , , , and . Proceedings of Eurosensors X, the 10th European Conference on Solid-State Transducers, 3, page 845-848. Heverlee, Catholic University Leuven, (1996)TopSpot - A New Method for the Fabrication of BioChips, , , , , , and . Screentech 2000, Southborough, MA, International Business Communications, (2000)Porous silicon as an ultraviolet light source, , , , and . Fractal aspects of materials : symposium, 367, Pittsburgh, Pa., Materials Research Society, (1995)A quartz crystal as an immunosensor, , , , , , and . Transducers '91 : digest of technical papers, page 693-696. New York, NY, IEEE, (1991)A modular integrated pressure control unit for gases, , , , , and . Technical digest / IEEE International MEMS '99 Conference, twelfth IEEE International Conference on Micro-Electro-Mechanical Systems, page 77-81. Piscataway, NJ, IEEE, (1999)