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Calculations on micromachined electro-thermal devices

B. Folkmer, M. Hirt, M. Vosseler, H. Glosch, F. Hedrich, W. Lang, and H. Sandmaier. Conference proceedings, 18. CAD-FEM Users' Meeting 2000, Internationale FEM-Technologietage, page 1.4.4. Grafing, CAD-FEM, (2000)

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B. Schlecht

Max B. Schäfer

Ilona Burk University of Stuttgart

75 Jahre Institut für Mikrointegration (IFM) Universität StuttgartA. Zimmermann, and I. Burk. Stuttgart, Universität Stuttgart, Institut für Mikrointegration, (2019)

Univ.-Prof. Dr. Alexander Brem University of Stuttgart

Dr. phil. André Blessing University of Stuttgart

Other publications of authors with the same name

New designs of micromachined rate gyroscopes with improved sensitivity through decoupled oscillation modesW. Geiger, B. Folkmer, U. Sobe, H. Sandmaier, and W. Lang. Sensor 97 : proceedings, 1, page 193-198. Wunstorf, ACS Organisations, (1997)CAD tools for micromechanicsH. Sandmaier, H. Offereins, and B. Folkmer. Journal of micromechanics and microengineering, 3 (3): 103-106 (1993)A monolithically integrated sensor system using sensor-specific CMOS cellsJ. Weber, S. Seitz, U. Steger, B. Folkmer, U. Schaber, A. Plettner, H. Offereins, H. Sandmaier, and E. Lindner. Proceedings of Eurosensors VIII, volume 3 of Sensors and actuators. A, Physical, page 137-142. (1995)A new silicon rate gyroscopeW. Geiger, B. Folkmer, J. Merz, H. Sandmaier, and W. Lang. Sensors and actuators. A, Physical, 73 (1/2): 45-51 (1999)Rationelle Simulation mikro-elektro-mechanischer Systeme unter Einsatz von FEM und SystemsimulationssoftwareB. Folkmer, B. Prillwitz, H. Sandmaier, and W. Lang. 16. CAD-FEM User's Meeting, Bad Neuenahr-Ahrweiler, Grafing bei München, CAD-FEM GmbH, (1998)Improved simulation for strongly coupled micro-electro-mechanical systems : resonant vacuum sensor optimizationB. Folkmer, A. Siber, W. Großse Bley, H. Sandmaier, and W. Lang. Fachtagung numerische Simulation in Feinwerk-, Mikrotechnik und Elektronik, München, Institut für Technologie- und Wissenstransfer an der Fachhochschule München, (1998)TPS10 als Basis für ein Tool zum Design von DrucksensorenH. Offereins, H. Sandmaier, B. Folkmer, A. Seidl, P. Groth, and R. Pressmar. Finite Elemente in der Praxis : computergestütztes Berechnen und Konstruieren, Reutlingen, T-Programm GmbH, (1991)Stress free assembly technique for a silicon based pressure sensorH. Offereins, H. Sandmaier, B. Folkmer, U. Steger, and W. Lang. Transducers '91 : digest of technical papers, page 986-989. New York, IEEE, (1991)Simulation tools for micro electro mechanical systemsB. Folkmer, and H. Sandmaier. Simulation and design of microsystems and microstructures, 13, page 321-328. Southampton, Computational Mechanics Publ., (1995)Improved rate gyroscope designs designated for fabrication by modern deep silicon etchingW. Geiger, B. Folkmer, H. Sandmaier, and W. Lang. Symposium Gyro-Technology 1997, page 2. Stuttgart, Universitat Stuttgart, Institut A für Mechanik, (1997)