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Scale spanning subnanometer metrology up to ten decades

, , , , , , , , , , and . Optical Measurement Systems for Industrial Inspection XI, 11056, page 110560L. Bellingham, Washington, USA, SPIE, (2019)
DOI: 10.1117/12.2526076

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Absolute determination of a large mirror surface from spatial gradients using a coordinate measuring machine, , , , , , and . volume 12672 of Proc. SPIE, SPIE, (2023)Scale spanning subnanometer metrology up to ten decades, , , , , , , , , and 1 other author(s). Optical Measurement Systems for Industrial Inspection XI, 11056, page 110560L. Bellingham, Washington, USA, SPIE, (2019)Scale spanning subnanometer metrology up to ten decades, , , , , , , , , and 1 other author(s). Optical Measurement Systems for Industrial Inspection XI, 11056, page 110560L. International Society for Optics and Photonics, SPIE, (2019)