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Compensation Corner Undercutting of (100) Silicon in KOH, , , , and . Sensors and Materials, 3 (3): 127-144 (1992)Application of porous silicon as a sacrificial layer, , , , , and . This volume contains papers presented at the 7th International Conference on Solid-State Sensors and Actuators (Transducers '93), 43, 1/3, page 239-242. Lausanne, Elsevier, (1994)