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         "id"   : "https://puma.ub.uni-stuttgart.de/bibtex/2a8492260592f80e99852d85b3cde1c6f/ifsw",         
         "tags" : [
            "myown","chirp","period","Interference","diffraction","Laser-Interference-Lithography","diffraction_grating","shaping","from:florianbienert","mathematical","Beam","peer","Laser","beams","gratings","interference","model","Gaussian","Holographic","Scanning-Beam-Interference-Lithography"
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         "intraHash" : "a8492260592f80e99852d85b3cde1c6f",
         "interHash" : "9a3e04001920d37b1994c5ed9ba327b8",
         "label" : "General mathematical model for the period chirp in interference lithography",
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         "date" : "2023-02-13 10:24:21",
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         "journal": "Opt. Express","publisher":"Optica Publishing Group",
         "year": "2023", 
         "url": "https://opg.optica.org/oe/abstract.cfm?URI=oe-31-4-5334", 
         
         "author": [ 
            "Florian Bienert","Thomas Graf","Marwan Abdou Ahmed"
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         "authors": [
         	
            	{"first" : "Florian",	"last" : "Bienert"},
            	{"first" : "Thomas",	"last" : "Graf"},
            	{"first" : "Marwan Abdou",	"last" : "Ahmed"}
         ],
         "volume": "31","number": "4","pages": "5334--5346","abstract": "We present a general analytical model for the calculation of the spatial distribution of the grating period, enabling the unification of all configurations of classical laser interference lithography (LIL) and scanning-beam interference lithography (SBIL) into one formalism. This is possible due to the consideration of Gaussian beams instead of point sources which allow for the accurate description of not only the laser&\\#x2019;s far-field but also its near-field. The proposed model enables the calculation of the grating period, the inclination and the slant of the grating lines on arbitrarily shaped substrates, originating from the interference of arbitrarily orientated and positioned Gaussian beams.",
         "doi" : "10.1364/OE.481887",
         
         "bibtexKey": "Bienert:23"

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         "label" : "Comparison between ray-tracing and physical optics for the computation of light absorption in capillaries -- the influence of diffraction and interference",
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         "journal": "Opt. Express","publisher":"OSA",
         "year": "2012", 
         "url": "http://www.opticsexpress.org/abstract.cfm?URI=oe-20-24-26606", 
         
         "author": [ 
            "Yuan Qin","Andreas Michalowski","Rudolf Weber","Sen Yang","Thomas Graf","Xiaowu Ni"
         ],
         "authors": [
         	
            	{"first" : "Yuan",	"last" : "Qin"},
            	{"first" : "Andreas",	"last" : "Michalowski"},
            	{"first" : "Rudolf",	"last" : "Weber"},
            	{"first" : "Sen",	"last" : "Yang"},
            	{"first" : "Thomas",	"last" : "Graf"},
            	{"first" : "Xiaowu",	"last" : "Ni"}
         ],
         "volume": "20","number": "24","pages": "26606--26617","abstract": "Ray-tracing is the commonly used technique to calculate the absorption of light in laser deep-penetration welding or drilling. Since new lasers with high brilliance enable small capillaries with high aspect ratios, diffraction might become important. To examine the applicability of the ray-tracing method, we studied the total absorptance and the absorbed intensity of polarized beams in several capillary geometries. The ray-tracing results are compared with more sophisticated simulations based on physical optics. The comparison shows that the simple ray-tracing is applicable to calculate the total absorptance in triangular grooves and in conical capillaries but not in rectangular grooves. To calculate the distribution of the absorbed intensity ray-tracing fails due to the neglected interference, diffraction, and the effects of beam propagation in the capillaries with sub-wavelength diameter. If diffraction is avoided e.g. with beams smaller than the entrance pupil of the capillary or with very shallow capillaries, the distribution of the absorbed intensity calculated by ray-tracing corresponds to the local average of the interference pattern found by physical optics.",
         "doi" : "10.1364/OE.20.026606",
         
         "bibtexKey": "Qin.2012.Comparison"

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            "Absorption","Capillary","Diffraction","Interference","Laser","RayTracing"
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         "label" : "Comparison between ray-tracing and physical optics for the computation of light absorption in capillaries -- the influence of diffraction and interference",
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         "journal": "Opt. Express","publisher":"OSA",
         "year": "2012", 
         "url": "http://www.opticsexpress.org/abstract.cfm?URI=oe-20-24-26606", 
         
         "author": [ 
            "Yuan Qin","Andreas Michalowski","Rudolf Weber","Sen Yang","Thomas Graf","Xiaowu Ni"
         ],
         "authors": [
         	
            	{"first" : "Yuan",	"last" : "Qin"},
            	{"first" : "Andreas",	"last" : "Michalowski"},
            	{"first" : "Rudolf",	"last" : "Weber"},
            	{"first" : "Sen",	"last" : "Yang"},
            	{"first" : "Thomas",	"last" : "Graf"},
            	{"first" : "Xiaowu",	"last" : "Ni"}
         ],
         "volume": "20","number": "24","pages": "26606--26617","abstract": "Ray-tracing is the commonly used technique to calculate the absorption of light in laser deep-penetration welding or drilling. Since new lasers with high brilliance enable small capillaries with high aspect ratios, diffraction might become important. To examine the applicability of the ray-tracing method, we studied the total absorptance and the absorbed intensity of polarized beams in several capillary geometries. The ray-tracing results are compared with more sophisticated simulations based on physical optics. The comparison shows that the simple ray-tracing is applicable to calculate the total absorptance in triangular grooves and in conical capillaries but not in rectangular grooves. To calculate the distribution of the absorbed intensity ray-tracing fails due to the neglected interference, diffraction, and the effects of beam propagation in the capillaries with sub-wavelength diameter. If diffraction is avoided e.g. with beams smaller than the entrance pupil of the capillary or with very shallow capillaries, the distribution of the absorbed intensity calculated by ray-tracing corresponds to the local average of the interference pattern found by physical optics.",
         "doi" : "10.1364/OE.20.026606",
         
         "bibtexKey": "Qin.2012.Comparison"

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