{ "types" : { "Bookmark" : { "pluralLabel" : "Bookmarks" }, "Publication" : { "pluralLabel" : "Publications" }, "GoldStandardPublication" : { "pluralLabel" : "GoldStandardPublications" }, "GoldStandardBookmark" : { "pluralLabel" : "GoldStandardBookmarks" }, "Tag" : { "pluralLabel" : "Tags" }, "User" : { "pluralLabel" : "Users" }, "Group" : { "pluralLabel" : "Groups" }, "Sphere" : { "pluralLabel" : "Spheres" } }, "properties" : { "count" : { "valueType" : "number" }, "date" : { "valueType" : "date" }, "changeDate" : { "valueType" : "date" }, "url" : { "valueType" : "url" }, "id" : { "valueType" : "url" }, "tags" : { "valueType" : "item" }, "user" : { "valueType" : "item" } }, "items" : [ { "type" : "Publication", "id" : "https://puma.ub.uni-stuttgart.de/bibtex/2351d23d83d82758f9f2b4a880651d5ac/ifsw", "tags" : [ "myown","chirp","diffraction","peer","interference","diffraction_grating","from:florianbienert" ], "intraHash" : "351d23d83d82758f9f2b4a880651d5ac", "interHash" : "7b7d90ef08e1e7c7c007e0771e7ba3b2", "label" : "Simple spatially resolved period measurement of chirped pulse compression gratings", "user" : "ifsw", "description" : "", "date" : "2023-06-03 15:24:54", "changeDate" : "2023-06-03 15:25:40", "count" : 1, "pub-type": "article", "journal": "Opt. Express","publisher":"Optica Publishing Group", "year": "2023", "url": "https://opg.optica.org/oe/abstract.cfm?URI=oe-31-12-19392", "author": [ "Florian Bienert","Christoph Röcker","Thomas Graf","Marwan Abdou Ahmed" ], "authors": [ {"first" : "Florian", "last" : "Bienert"}, {"first" : "Christoph", "last" : "Röcker"}, {"first" : "Thomas", "last" : "Graf"}, {"first" : "Marwan Abdou", "last" : "Ahmed"} ], "volume": "31","number": "12","pages": "19392--19403","abstract": "We present an easy-to-implement and low-cost setup for the precise measurement of the period chirp of diffraction gratings offering a resolution of 15 pm and reasonable scan speeds of 2 seconds per measurement point. The principle of the measurement is illustrated on the example of two different pulse compression gratings, one fabricated by laser interference lithography (LIL) and the other by scanning beam interference lithography (SBIL). A period chirp of 0.22 pm/mm2 at a nominal period of 610 nm was measured for the grating fabricated with LIL, whereas no chirp was observed for the grating fabricated by SBIL, which had a nominal period of 586.2 nm.", "doi" : "10.1364/OE.489238", "bibtexKey": "Bienert:23" } , { "type" : "Publication", "id" : "https://puma.ub.uni-stuttgart.de/bibtex/2a8492260592f80e99852d85b3cde1c6f/florianbienert", "tags" : [ "chirp","diffraction","diffraction_grating","interference","myown","peer" ], "intraHash" : "a8492260592f80e99852d85b3cde1c6f", "interHash" : "9a3e04001920d37b1994c5ed9ba327b8", "label" : "General mathematical model for the period chirp in interference lithography", "user" : "florianbienert", "description" : "", "date" : "2023-02-13 10:25:03", "changeDate" : "2023-02-13 09:30:32", "count" : 3, "pub-type": "article", "journal": "Opt. Express","publisher":"Optica Publishing Group", "year": "2023", "url": "https://opg.optica.org/oe/abstract.cfm?URI=oe-31-4-5334", "author": [ "Florian Bienert","Thomas Graf","Marwan Abdou Ahmed" ], "authors": [ {"first" : "Florian", "last" : "Bienert"}, {"first" : "Thomas", "last" : "Graf"}, {"first" : "Marwan Abdou", "last" : "Ahmed"} ], "volume": "31","number": "4","pages": "5334--5346","abstract": "We present a general analytical model for the calculation of the spatial distribution of the grating period, enabling the unification of all configurations of classical laser interference lithography (LIL) and scanning-beam interference lithography (SBIL) into one formalism. This is possible due to the consideration of Gaussian beams instead of point sources which allow for the accurate description of not only the laser&\\#x2019;s far-field but also its near-field. The proposed model enables the calculation of the grating period, the inclination and the slant of the grating lines on arbitrarily shaped substrates, originating from the interference of arbitrarily orientated and positioned Gaussian beams.", "doi" : "10.1364/OE.481887", "bibtexKey": "Bienert:23" } , { "type" : "Publication", "id" : "https://puma.ub.uni-stuttgart.de/bibtex/2a8492260592f80e99852d85b3cde1c6f/ifsw", "tags" : [ "myown","chirp","period","Interference","diffraction","Laser-Interference-Lithography","diffraction_grating","shaping","from:florianbienert","mathematical","Beam","peer","Laser","beams","gratings","interference","model","Gaussian","Holographic","Scanning-Beam-Interference-Lithography" ], "intraHash" : "a8492260592f80e99852d85b3cde1c6f", "interHash" : "9a3e04001920d37b1994c5ed9ba327b8", "label" : "General mathematical model for the period chirp in interference lithography", "user" : "ifsw", "description" : "", "date" : "2023-02-13 10:24:21", "changeDate" : "2023-02-13 09:30:48", "count" : 3, "pub-type": "article", "journal": "Opt. Express","publisher":"Optica Publishing Group", "year": "2023", "url": "https://opg.optica.org/oe/abstract.cfm?URI=oe-31-4-5334", "author": [ "Florian Bienert","Thomas Graf","Marwan Abdou Ahmed" ], "authors": [ {"first" : "Florian", "last" : "Bienert"}, {"first" : "Thomas", "last" : "Graf"}, {"first" : "Marwan Abdou", "last" : "Ahmed"} ], "volume": "31","number": "4","pages": "5334--5346","abstract": "We present a general analytical model for the calculation of the spatial distribution of the grating period, enabling the unification of all configurations of classical laser interference lithography (LIL) and scanning-beam interference lithography (SBIL) into one formalism. This is possible due to the consideration of Gaussian beams instead of point sources which allow for the accurate description of not only the laser&\\#x2019;s far-field but also its near-field. The proposed model enables the calculation of the grating period, the inclination and the slant of the grating lines on arbitrarily shaped substrates, originating from the interference of arbitrarily orientated and positioned Gaussian beams.", "doi" : "10.1364/OE.481887", "bibtexKey": "Bienert:23" } , { "type" : "Publication", "id" : "https://puma.ub.uni-stuttgart.de/bibtex/28369a5b0b9c1d5b9bd78f25cc22c6d13/florianbienert", "tags" : [ "LIL","algorithm","chirp","diffraction","diffraction_grating","grating","interference","interference_lithography","myown","peer","therory" ], "intraHash" : "8369a5b0b9c1d5b9bd78f25cc22c6d13", "interHash" : "503e2f12069fc6f23a499ccd4bb69f64", "label" : "Theoretical investigation on the elimination of the period chirp by deliberate substrate deformations", "user" : "florianbienert", "description" : "", "date" : "2022-06-09 10:04:50", "changeDate" : "2022-06-09 08:04:50", "count" : 3, "pub-type": "article", "journal": "Optics Express","publisher":"Optica Publishing Group", "year": "2022", "url": "https://doi.org/10.1364%2Foe.458636", "author": [ "Florian Bienert","Thomas Graf","Marwan Abdou Ahmed" ], "authors": [ {"first" : "Florian", "last" : "Bienert"}, {"first" : "Thomas", "last" : "Graf"}, {"first" : "Marwan", "last" : "Abdou Ahmed"} ], "volume": "30","number": "13","pages": "22410","abstract": "We present a theoretical investigation on the approach of deliberately bending the substrate during the exposure within laser interference lithography to compensate for the period chirp. It is shown that the yet undiscovered function of the surface geometry, necessary to achieve the zero-chirp case (i.e. having a perfectly constant period over the whole substrate) is determined by a first-order differential equation. As the direct analytical solution of this differential equation is difficult, a numerical approach is developed, based on the optimization of pre-defined functions towards the unknown analytical solution of the differential equation by means of a Nelder-Mead simplex algorithm. By applying this method to a concrete example, we show that an off-center placement of the substrate with respect to the point sources is advantageous both in terms of achievable period and substrate curvature and that a fourth-order polynomial can greatly satisfy the differential equation leading to a root-mean-square deviation of only 1.4 pm with respect to the targeted period of 610\u2005nm.", "doi" : "10.1364/oe.458636", "bibtexKey": "Bienert_2022" } , { "type" : "Publication", "id" : "https://puma.ub.uni-stuttgart.de/bibtex/28369a5b0b9c1d5b9bd78f25cc22c6d13/ifsw", "tags" : [ "myown","chirp","diffraction","diffraction_grating","interference_lithography","LIL","from:florianbienert","grating","peer","interference","therory","algorithm" ], "intraHash" : "8369a5b0b9c1d5b9bd78f25cc22c6d13", "interHash" : "503e2f12069fc6f23a499ccd4bb69f64", "label" : "Theoretical investigation on the elimination of the period chirp by deliberate substrate deformations", "user" : "ifsw", "description" : "", "date" : "2022-06-09 10:04:50", "changeDate" : "2022-06-09 08:04:50", "count" : 3, "pub-type": "article", "journal": "Optics Express","publisher":"Optica Publishing Group", "year": "2022", "url": "https://doi.org/10.1364%2Foe.458636", "author": [ "Florian Bienert","Thomas Graf","Marwan Abdou Ahmed" ], "authors": [ {"first" : "Florian", "last" : "Bienert"}, {"first" : "Thomas", "last" : "Graf"}, {"first" : "Marwan", "last" : "Abdou Ahmed"} ], "volume": "30","number": "13","pages": "22410","abstract": "We present a theoretical investigation on the approach of deliberately bending the substrate during the exposure within laser interference lithography to compensate for the period chirp. It is shown that the yet undiscovered function of the surface geometry, necessary to achieve the zero-chirp case (i.e. having a perfectly constant period over the whole substrate) is determined by a first-order differential equation. As the direct analytical solution of this differential equation is difficult, a numerical approach is developed, based on the optimization of pre-defined functions towards the unknown analytical solution of the differential equation by means of a Nelder-Mead simplex algorithm. By applying this method to a concrete example, we show that an off-center placement of the substrate with respect to the point sources is advantageous both in terms of achievable period and substrate curvature and that a fourth-order polynomial can greatly satisfy the differential equation leading to a root-mean-square deviation of only 1.4 pm with respect to the targeted period of 610\u2005nm.", "doi" : "10.1364/oe.458636", "bibtexKey": "Bienert_2022" } ] }