%0 Conference Paper %1 pham2000micromachining %A Pham, Nga Phuong %A Ng, Kiat T. %A Bartek, Marian %A Sarro, Pasqualina M. %A Rejaei, Behzad %A Burghartz, Joachim N. %B International Electron Devices Meeting 2000 : Technical Digest %C Piscataway, New Jersey %D 2000 %I IEEE %K INES %P 481-484 %R 10.1109/IEDM.2000.904360 %T A Micromachining Post-Process Module for RF Silicon Technology %@ 0-7803-6438-4

@inproceedings{pham2000micromachining, added-at = {2019-04-04T14:31:55.000+0200}, address = {Piscataway, New Jersey}, author = {Pham, Nga Phuong and Ng, Kiat T. and Bartek, Marian and Sarro, Pasqualina M. and Rejaei, Behzad and Burghartz, Joachim N.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/252f29cc45c6f4b25f4877191625b09da/kevin.konnerth}, booktitle = {International Electron Devices Meeting 2000 : Technical Digest}, doi = {10.1109/IEDM.2000.904360}, eventdate = {2000-12-10/2000-12-13}, eventtitle = {International Electron Devices Meeting 2000}, interhash = {f87980137f17986f52fa77c45f6e0594}, intrahash = {52f29cc45c6f4b25f4877191625b09da}, isbn = {0-7803-6438-4}, keywords = {INES}, pages = {481-484}, publisher = {IEEE}, timestamp = {2019-04-04T12:31:55.000+0200}, title = {A Micromachining Post-Process Module for RF Silicon Technology}, venue = {San Francisco, USA}, year = 2000 }