%0 Thesis %1 Stubenvoll.2012.Grundlagenuntersuchungen %A Stubenvoll, M. %D 2012 %K Ablation Diplomarbeit Hafner,Margit Laser ProcessDevelopment %N IFSW12-12 %T Grundlagenuntersuchungen zur schädigungsfreien Laserablation dünner metallschichten von Silizium

@mastersthesis{Stubenvoll.2012.Grundlagenuntersuchungen, added-at = {2019-04-09T09:03:31.000+0200}, author = {Stubenvoll, M.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/25468c57d8ae173caa0eebd567e543944/florianfetzer}, interhash = {eeb6cc046a8afc68547161db033bf2df}, intrahash = {5468c57d8ae173caa0eebd567e543944}, keywords = {Ablation Diplomarbeit Hafner,Margit Laser ProcessDevelopment}, month = may, number = { IFSW12-12 }, timestamp = {2019-04-09T07:03:31.000+0200}, title = {Grundlagenuntersuchungen zur schädigungsfreien Laserablation dünner metallschichten von Silizium}, year = 2012 }