Improved rate gyroscope designs designated for fabrication by modern deep silicon etching
W. Geiger, B. Folkmer, H. Sandmaier, and W. Lang. Symposium Gyro-Technology 1997, page 2. Stuttgart, Universitat Stuttgart, Institut A für Mechanik, (1997)
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%0 Conference Paper
%1 geiger1997improved
%A Geiger, W.
%A Folkmer, B.
%A Sandmaier, Hermann
%A Lang, Walter
%B Symposium Gyro-Technology 1997
%C Stuttgart
%D 1997
%E Sorg, Helmut
%I Universitat Stuttgart, Institut A für Mechanik
%K
%P 2
%T Improved rate gyroscope designs designated for fabrication by modern deep silicon etching
@inproceedings{geiger1997improved,
added-at = {2023-09-01T10:41:53.000+0200},
address = {Stuttgart},
author = {Geiger, W. and Folkmer, B. and Sandmaier, Hermann and Lang, Walter},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/26fdc25a7c4a2a38e15c89de21da012e4/unibiblio-4},
booktitle = {Symposium Gyro-Technology 1997},
editor = {Sorg, Helmut},
eventdate = {1997-09-16/1997-09-17},
eventtitle = {Symposium Gyro-Technology 1997},
interhash = {e5c71c94634c5da766bf2ad59a4dc005},
intrahash = {6fdc25a7c4a2a38e15c89de21da012e4},
keywords = {},
language = {eng},
pages = 2,
publisher = {Universitat Stuttgart, Institut A für Mechanik},
timestamp = {2023-09-01T08:41:53.000+0200},
title = {Improved rate gyroscope designs designated for fabrication by modern deep silicon etching},
venue = {Stuttgart},
year = 1997
}
