%0 Conference Paper %1 schumacher1996microstructures %A Schumacher, A. %A Alavi, M. %A Schmidt, B. %A Sandmaier, Hermann %B Micro system technologies 96 %C Berlin %D 1996 %I VDE-Verl. %K %P 633-638 %T 3D microstructures in silicon using laser induced dry etching %@ 3-8007-2200-3

@inproceedings{schumacher1996microstructures, added-at = {2023-09-01T10:41:51.000+0200}, address = {Berlin}, author = {Schumacher, A. and Alavi, M. and Schmidt, B. and Sandmaier, Hermann}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/27b0fcc520bf115818e6d7813fd41bda6/unibiblio-4}, booktitle = {Micro system technologies 96}, eventdate = {1996-09-17/1996-09-19}, eventtitle = {5th International Conference on Micro Electro, Opto, Mechanical Systems and Components}, interhash = {cdac090690bb3a2efb10b8eff8904902}, intrahash = {7b0fcc520bf115818e6d7813fd41bda6}, isbn = {3-8007-2200-3}, keywords = {}, language = {eng}, pages = {633-638}, publisher = {VDE-Verl.}, timestamp = {2023-09-01T08:41:51.000+0200}, title = {3D microstructures in silicon using laser induced dry etching}, venue = {Potsdam}, year = 1996 }