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%0 Conference Paper
%1 folkmer1996multi
%A Folkmer, B.
%A Hey, N.
%A Sandmaier, Hermann
%A Lang, W.
%B Proceedings of Eurosensors X
%C Heverlee, Belgium
%D 1996
%I Catholic University Leuven
%K
%P 1357-1360
%T Multi level coupled simulations for MEMS design
%V 5
@inproceedings{folkmer1996multi,
added-at = {2023-09-01T10:42:00.000+0200},
address = {Heverlee, Belgium},
author = {Folkmer, B. and Hey, N. and Sandmaier, Hermann and Lang, W.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/265f0f33264b8124fc50554a8aee32c2c/unibiblio-4},
booktitle = {Proceedings of Eurosensors X},
eventdate = {1996-09-08/1996-09-11},
eventtitle = {Eurosensors X, the 10th European Conference on Solid State Transducers},
interhash = {af02d94b8e93ef2191f63e1296963384},
intrahash = {65f0f33264b8124fc50554a8aee32c2c},
keywords = {},
language = {eng},
pages = {1357-1360},
publisher = {Catholic University Leuven},
timestamp = {2023-09-01T08:42:00.000+0200},
title = {Multi level coupled simulations for MEMS design},
venue = {Leuven, Belgium},
volume = 5,
year = 1996
}
