%0 Conference Paper %1 Lyda2010a %A Lyda, W. %A Burla, A. %A Haist, T. %A Zimmermann, J. %A Osten, W. %A Sawodny, O. %B SPIE Conference on Optical Micro- and Nanometrology %D 2010 %K ito %R 10.1117/12.853819 %T Automated Multi-Scale Measurement System for MEMS-Characterization

@inproceedings{Lyda2010a, added-at = {2019-10-08T08:27:14.000+0200}, author = {Lyda, W. and Burla, A. and Haist, T. and Zimmermann, J. and Osten, W. and Sawodny, O.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2cb79168a27e1786257fe855559ace2a9/faulhaber}, booktitle = {SPIE Conference on Optical Micro- and Nanometrology}, doi = {10.1117/12.853819}, file = {Lyda2010a_SPIE_Automated_Measurement_System.pdf:..\\pdfs\\Lyda2010a_SPIE_Automated_Measurement_System.pdf:PDF}, interhash = {aaa3353b78696fcbe8809b0a1f5de8b5}, intrahash = {cb79168a27e1786257fe855559ace2a9}, isys_group = {MFU, OptoMech}, keywords = {ito}, timestamp = {2019-10-08T06:27:14.000+0200}, title = {Automated Multi-Scale Measurement System for MEMS-Characterization}, year = 2010 }