%0 Journal Article %1 haub2021development %A Haub, Michael %A Bogner, Martin %A Günther, Thomas %A Zimmermann, André %A Sandmaier, Hermann %D 2021 %I MDPI %J Sensors %K %N 11 %P 3795 %R 10.3390/s21113795 %T Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning %V 21

@article{haub2021development, added-at = {2023-08-31T16:48:43.000+0200}, author = {Haub, Michael and Bogner, Martin and Günther, Thomas and Zimmermann, André and Sandmaier, Hermann}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2969c470195d4f2e1ddb37b449dc567f9/puma-wartung}, doi = {10.3390/s21113795}, interhash = {9e9ea9008e324533732262ad565f8e03}, intrahash = {969c470195d4f2e1ddb37b449dc567f9}, issn = {1424-8220}, journal = {Sensors}, keywords = {}, language = {eng}, number = 11, pages = 3795, publisher = {MDPI}, timestamp = {2023-08-31T14:48:43.000+0200}, title = {Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning}, volume = 21, year = 2021 }