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%0 Journal Article
%1 haub2021development
%A Haub, Michael
%A Bogner, Martin
%A Günther, Thomas
%A Zimmermann, André
%A Sandmaier, Hermann
%D 2021
%I MDPI
%J Sensors
%K
%N 11
%P 3795
%R 10.3390/s21113795
%T Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning
%V 21
@article{haub2021development,
added-at = {2023-08-31T16:48:43.000+0200},
author = {Haub, Michael and Bogner, Martin and Günther, Thomas and Zimmermann, André and Sandmaier, Hermann},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2969c470195d4f2e1ddb37b449dc567f9/puma-wartung},
doi = {10.3390/s21113795},
interhash = {9e9ea9008e324533732262ad565f8e03},
intrahash = {969c470195d4f2e1ddb37b449dc567f9},
issn = {1424-8220},
journal = {Sensors},
keywords = {},
language = {eng},
number = 11,
pages = 3795,
publisher = {MDPI},
timestamp = {2023-08-31T14:48:43.000+0200},
title = {Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning},
volume = 21,
year = 2021
}